JPH0648259Y2 - クリーンルーム用センサ類の取付構造 - Google Patents

クリーンルーム用センサ類の取付構造

Info

Publication number
JPH0648259Y2
JPH0648259Y2 JP1990014656U JP1465690U JPH0648259Y2 JP H0648259 Y2 JPH0648259 Y2 JP H0648259Y2 JP 1990014656 U JP1990014656 U JP 1990014656U JP 1465690 U JP1465690 U JP 1465690U JP H0648259 Y2 JPH0648259 Y2 JP H0648259Y2
Authority
JP
Japan
Prior art keywords
clean room
partition wall
sensor
mounting structure
room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990014656U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03107648U (en]
Inventor
浩二 山田
Original Assignee
須賀工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 須賀工業株式会社 filed Critical 須賀工業株式会社
Priority to JP1990014656U priority Critical patent/JPH0648259Y2/ja
Publication of JPH03107648U publication Critical patent/JPH03107648U/ja
Application granted granted Critical
Publication of JPH0648259Y2 publication Critical patent/JPH0648259Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Ventilation (AREA)
JP1990014656U 1990-02-19 1990-02-19 クリーンルーム用センサ類の取付構造 Expired - Lifetime JPH0648259Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990014656U JPH0648259Y2 (ja) 1990-02-19 1990-02-19 クリーンルーム用センサ類の取付構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990014656U JPH0648259Y2 (ja) 1990-02-19 1990-02-19 クリーンルーム用センサ類の取付構造

Publications (2)

Publication Number Publication Date
JPH03107648U JPH03107648U (en]) 1991-11-06
JPH0648259Y2 true JPH0648259Y2 (ja) 1994-12-12

Family

ID=31518004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990014656U Expired - Lifetime JPH0648259Y2 (ja) 1990-02-19 1990-02-19 クリーンルーム用センサ類の取付構造

Country Status (1)

Country Link
JP (1) JPH0648259Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644545A (en) * 1979-09-20 1981-04-23 Matsushita Electric Ind Co Ltd Controller of air conditioner
JPS618857U (ja) * 1985-05-22 1986-01-20 大成建設株式会社 建物における強制通風式温湿度測定装置

Also Published As

Publication number Publication date
JPH03107648U (en]) 1991-11-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term